Chemistry

Radiation Imagery Chemistry: Process, Composition, Or Product Thereof

Including Control Feature Responsive To A Test Or Measurement

No:6517983

Aberration estimating mask pattern

No:6960415

Aberration measuring method and projection exposure apparatus

No:6437858

Aberration measuring method, aberration measuring system and aberration measuring mask

No:7288344

Accommodating diffraction in the printing of features on a substrate

No:6238830

Active control of temperature in scanning probe lithography and maskless lithograpy

No:6368762

Active mask exposure compensation of underlying nitride thickness variation to reduce critical dimension (cd) variation

No:6100950

Active matrix lcd with thin film transistor switches and method of producing the same

No:4835704

Adaptive lithography system to provide high density interconnect

No:6538740

Adjusting method for position detecting apparatus

No:5945239

Adjustment method for an optical projection system to change image distortion

No:7479356

Aligning method

No:5783341

Alignment for layer formation through determination of target values for translation, rotation and magnification

No:5981116

Alignment in a projection exposure method

No:3745358

Alignment method and apparatus for electron projection systems

No:7098046

Alignment method and exposure apparatus using the method

No:5914207

Alignment method for optical fibers for use in manufacturing an optical filter

No:7255968

Alignment method of exposure mask and manufacturing method of thin film element substrate

No:7420676

Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatus

No:6610448

Alignment method, overlay deviation inspection method and photomask

No:6809824

Alignment process for integrated circuit structures on semiconductor substrate using scatterometry measurements of latent images in spaced apart test fields on substrate

No:7070405

Alignment systems for imprint lithography

No:6365307

Apparatus and method for assessing a photoreceptor

No:5815685

Apparatus and method for correcting light proximity effects by predicting mask performance

No:6313905

Apparatus and method for defining a pattern on a substrate

No:6298473

Apparatus and method for inhibiting pattern distortions to correct pattern data in a semiconductor device

No:3574458

Apparatus and method for modifying contrast in photographic images

No:6016391

Apparatus and method for optimizing integrated circuit fabrication

No:5709972

Apparatus and method for the measurement of grain in images

No:6925414

Apparatus and method of measuring features of an article

No:7179571

Apparatus for characterization of photoresist resolution, and method of use

No:6051349

Apparatus for coating resist and developing the coated resist

No:7164960

Apparatus for correcting a plurality of exposure tools, method for correcting a plurality of exposure tools, and method for manufacturing semiconductor device

No:6372105

Apparatus for measuring a silver or halogen ion concentration

No:5978085

Apparatus method of measurement and method of data analysis for correction of optical system

No:7244334

Apparatus used in reshaping a surface of a photoresist

No:6051347

Application of e-beam proximity over-correction to compensate optical proximity effect in optical lithography process

No:4812962

Area feature sorting mechanism for neighborhood-based proximity correction in lithography processing of integrated circuit patterns

No:6787272

Assist feature for random, isolated, semi-dense, and other non-dense contacts

No:6887625

Assist features for use in lithographic projection

No:5741614

Atomic force microscope measurement process for dense photoresist patterns

No:3567914

Automated manufacturing system

No:7087352

Automated overlay metrology system

No:7368206

Automated overlay metrology system

No:4460270

Automatic exposure control for a photocopying machine

No:3615479

Automatic film processing method and apparatus therefor

No:7024996

Automatic processing method of photosensitive lithographic printing plate and automatic processing apparatus thereof

No:6890691

Backing layer of a donor element for adjusting the focus on an imaging laser

No:6866975

Best focus determining method

No:5750294

Best focus determining method

No:7147976

Binary opc for assist feature layout optimization