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No:6778275
Aberration mark and method for estimating overlay error and optical aberrations
No:7382446
Aberration measuring method
No:6437858
Aberration measuring method, aberration measuring system and aberration measuring mask
No:6864962
Active anti-vibration apparatus and exposure apparatus and device manufacturing method using the same
No:6937317
Active damping apparatus, exposure apparatus and device manufacturing method
No:6590639
Active vibration isolation system having pressure control
No:6841956
Actuator to correct for off center-of-gravity line of force
No:6404481
Adaptive lithography membrane masks
No:7307697
Adaptive shape substrate support system
No:5563684
Adaptive wafer modulator for placing a selected pattern on a semiconductor wafer
No:5966202
Adjustable slit
No:5691803
Advanced exposure apparatus and exposure method using the same
No:7050155
Advanced exposure techniques for programmable lithography
No:7460209
Advanced mask patterning with patterning layer
No:6760094
Aligner
No:5270771
Aligner and exposure method for manufacturing semiconductor device
No:5532091
Aligning method
No:7212286
Aligning method, exposure method, exposure apparatus, and device manufacturing method
No:5160957
Alignment and exposure apparatus
No:5148214
Alignment and exposure apparatus
No:4901109
Alignment and exposure apparatus
No:5365342
Alignment and exposure apparatus and method for manufacture of integrated circuits
No:4937618
Alignment and exposure apparatus and method for manufacture of integrated circuits
No:5477309
Alignment apparatus
No:4794426
Alignment apparatus
No:7053982
Alignment apparatus and exposure apparatus
No:7271875
Alignment apparatus, exposure apparatus and device fabrication method
No:7110116
Alignment apparatus, exposure apparatus using same, and method of manufacturing devices
No:7173716
Alignment apparatus, exposure apparatus using the same, and method of manufacturing devices
No:5721605
Alignment device and method with focus detection system
No:7245351
Alignment mark for coarse alignment and fine alignment of a semiconductor wafer in an exposure tool
No:7075621
Alignment method
No:5805866
Alignment method
No:5831739
Alignment method
No:5585925
Alignment method
No:5377009
Alignment method
No:5499099
Alignment method and alignment system
No:5721607
Alignment method and apparatus
No:5534969
Alignment method and apparatus in an exposing process
No:5682228
Alignment method and apparatus in an exposing process
No:6876946
Alignment method and apparatus therefor
No:6481003
Alignment method and method for producing device using the alignment method
No:6002487
Alignment method for performing alignment between shot areas on a wafer
No:7006226
Alignment method, alignment apparatus, exposure apparatus using the same, and device manufactured by using the same
No:7190456
Alignment method, alignment apparatus, exposure apparatus using the same, and device manufactured by using the same
No:6559924
Alignment method, alignment apparatus, profiler, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory
No:6963389
Alignment method, exposure apparatus and device fabrication method
No:7187429
Alignment method, exposure apparatus and device fabrication method
No:6141082
Alignment method, exposure method, and exposure apparatus
No:5850279
Alignment method, projection exposure method, and projection exposure apparatus

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