Machines

Material Or Article Handling

Associated With Semiconductor Wafer Handling

No:7022009

Air cleaning system for semiconductor manufacturing equipment

No:6676365

Air track conveyor system for disk production

No:6374508

Apparatus and method for aligning a substrate on a support member

No:6488778

Apparatus and method for controlling wafer environment between thermal clean and thermal processing

No:6287984

Apparatus and method for manufacturing semiconductor device

No:5001327

Apparatus and method for performing heat treatment on semiconductor wafers

No:6519502

Apparatus and method for positioning a cassette pod onto a loadport by an overhead hoist transport system

No:5883522

Apparatus and method for retaining a semiconductor wafer during testing

No:6709877

Apparatus and method for testing semiconductor devices

No:6187103

Apparatus and method for transporting wafers

No:6403924

Apparatus for and method of heat treatment and substrate processing apparatus

No:5466945

Apparatus for detecting proper positioning of objects in a holder

No:5961722

Apparatus for establishing reference coordinates for a point on a component

No:4591044

Apparatus for feeding wafers and the like

No:6833048

Apparatus for in-cassette monitoring of semiconductor wafers

No:4881863

Apparatus for inspecting wafers

No:5314538

Apparatus for manufacturing semiconductor device and method for manufacturing semiconductor device

No:6500261

Apparatus for preventing misplacement of a cassette pod onto a process machine

No:6099643

Apparatus for processing a substrate providing an efficient arrangement and atmospheric isolation of chemical treatment section

No:5565034

Apparatus for processing substrates having a film formed on a surface of the substrate

No:5989342

Apparatus for substrate holding

No:5768125

Apparatus for transferring a substantially circular article

No:7027894

Article holders with sensors detecting a type of article held by the holder

No:6615113

Articles holders with sensors detecting a type of article held by the holder

No:4730976

Articulated arm transfer device

No:6460414

Automated acoustic micro imaging system and method

No:6439824

Automated semiconductor immersion processing system

No:6050768

Automatic carrier control method in semiconductor wafer cassette transportation apparatus

No:5743695

Automatic chip-loading apparatus

No:6178361

Automatic modular wafer substrate handling device

No:5321634

Automatic thin-film measuring apparatus

No:5174067

Automatic wafer lapping apparatus

No:3902615

Automatic wafer loading and pre-alignment system

No:5951770

Carousel wafer transfer system

No:6287386

Carousel wafer transfer system

No:6186722

Chamber apparatus for processing semiconductor devices

No:6938505

Chamber wafer detection

No:5435682

Chemical vapor desposition system

No:6955595

Clean room system

No:6368208

Cleanroom and cleanroom ventilation method

No:5320218

Closed container to be used in a clean room

No:6175169

Closed-loop planar linear motor with integral monolithic three-degree-of-freedom ac-magnetic position/orientation sensor

No:6530993

Cluster tool for fabricating semiconductor device

No:5772773

Co-axial motorized wafer lift

No:7210864

Coating and developing apparatus

No:5883017

Compartmentalized substrate processing chamber

No:5730801

Compartnetalized substrate processing chamber

No:5024570

Continuous semiconductor substrate processing system

No:5741113

Continuously rotatable multiple link robot arm mechanism

No:6224679

Controlling gas in a multichamber processing system